By Dieter Bäuerle
Laser Processing and Chemistry provides an outline of the basics and purposes of laser-matter interactions, particularly in regards to laser fabric processing. exact realization is given to laser-induced actual and chemical strategies at gas-solid, liquid-solid, and solid-solid interfaces. beginning with the historical past physics, the booklet proceeds to envision purposes of laser options in micro-machining, and the patterning, coating, and amendment of fabric surfaces. This fourth version has been revised and enlarged to hide new issues equivalent to 3D microfabrication, advances in nanotechnology, ultrafast laser know-how and laser chemical processing (LCP).
Graduate scholars, physicists, chemists, engineers, and brands alike will locate this ebook a useful reference paintings on laser processing.
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Additional info for Chemical Processing with Lasers
Followed by energy absorption by the quasi-continuum until the lowest dissociation channel is reached. Collisionless infrared multi photon excitation and dissociation of many molecules. including SF6. BC13. CO(CF3)2. CF 3I and CDF3' which are also used in LCP. is consistent with this model. Clearly. this model describes the situation in gas mixtures equally well. 31) is fulfilled. The average number of IR photons absorbed by a molecule is
PERKINS et a1. 96J have studied the 147 nm photolysis of SiH 4 , using a Xe resonance 1amp. 2). The shortest laser wavelength that has been used for the decomposition of SiH 4 is 193 nm. 1). At 193 nm. SiH4 has negligible linear absorption. However. the molecule can be dissociated at this wavelength with relatively low fluences « 10 MW/cm 2 ) by multi photon excitation. 97 J. At wavel engths 1ess than 200 nm. the primary photol ys i s steps for AsH3. 82H6 and PH3 are thought to include production of AsH2' 82H5.
The value of W e will depend on the radiation intensity and the cross section of the specific vibrational transition. For further details see, for example, the monographs by BEN-SHAUL et al. 52J. Mode- or bond-selective multiphoton excitation requires an excitation rate that is large compared to the rate of intramolecular vibrational energy transfer. This would need laser pumping in a mode fairly isolated from the other vibrational modes and high laser intensity picosecond or subpicosecond excitation.